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Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing

Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing

Innovating the semiconductor manufacturing process with nanometer-level precision.

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity

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A-62x Air Bearing Rotary Stage for Optical Adjustment

A-62x Air Bearing Rotary Stage for Optical Adjustment

Supports optical system adjustments with nanometer-level precision.

In the optical industry, precise positioning of optical elements such as lenses and mirrors is a crucial factor that affects system performance. Particularly in high-precision optical inspection and alignment, even slight deviations in angle or position can significantly impact measurement results. The air-bearing rotary stage PIglideA-62x high-precision model achieves minimal wobble and eccentricity through frictionless, non-contact rotation, realizing flatness and eccentricity of less than 200nm. This enables precise positioning of optical elements and supports high-precision optical inspection and alignment. 【Usage Scenarios】 - Angle adjustment of optical lenses and mirrors - Precise alignment of optical elements - Construction of optical inspection systems 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Achieves high-precision optical measurements - Contributes to improved system performance

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Air Bearing Rotary Stage A-62x for Measurement and Inspection

Air Bearing Rotary Stage A-62x for Measurement and Inspection

Contributing to the improvement of calibration work accuracy with zero friction rotational precision.

In the calibration work of the measurement equipment industry, the accuracy and reproducibility of measurement results are crucial. Particularly in the calibration of rotational angles, the rotation precision and stability of the stage directly affect the measurement results. The air bearing rotary stage PIglide A-62x achieves low wobble and smooth rotational motion through frictionless non-contact rotation, supporting high-precision angle calibration. 【Application Scenarios】 - Calibration of angle measuring instruments - Calibration of rotational angle sensors - Adjustment of optical systems 【Benefits of Implementation】 - Realization of high-precision calibration work - Improvement in the reliability of measurement results - Enhancement of work efficiency

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Air bearing rotating stage for wafer inspection and measurement for semiconductors.

Air bearing rotating stage for wafer inspection and measurement for semiconductors.

Slim and high precision. Enhancing the positioning accuracy in semiconductor manufacturing.

In semiconductor manufacturing, high-precision positioning of wafers and photomasks is a crucial factor that affects product quality and yield. Particularly in fine processing and inspection processes, high positioning accuracy and stable operation are required. The A-68x air bearing rotation stage is a high-precision rotating stage that employs air levitation guides. It is less affected by friction or component precision compared to conventional mechanical guides, suppressing stick-slip and frictional heat. This enables high-speed and high-precision rotational positioning. As a result, it contributes to improving the accuracy of inspection, measurement, and alignment in semiconductor manufacturing processes, supporting increased productivity and the production of high-quality devices. 【Application Scenarios】 - Wafer inspection and measurement - Precision positioning of wafers - Photomask alignment - Semiconductor inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity through high-speed drive - Stable processes due to suppression of frictional heat - Long lifespan and low maintenance due to non-contact structure

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Optical Large Aperture Air Bearing Rotary Stage A-68x

Optical Large Aperture Air Bearing Rotary Stage A-68x

Thin and high-precision air bearing rotation stage, ideal for optical system adjustments.

In the adjustment of optical systems, precise positioning and angle adjustment of the optical axis are crucial elements. Optical components such as lenses and mirrors can significantly affect the overall performance of the system even with slight deviations in position or angle. The A-68x air bearing rotation stage is a high-precision rotation stage that employs air suspension guides. It is less susceptible to friction effects like traditional mechanical guides, suppressing stick-slip and frictional heat. Its smooth and stable rotational motion enables high-precision angular positioning. This contributes to the efficiency of alignment work in optical systems and enhances the performance of optical systems. 【Application Scenarios】 - Angle adjustment of lenses and mirrors - Alignment of optical components - Alignment of optical fibers - Optical measurement and inspection equipment 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Increased efficiency of adjustment work due to smooth rotational motion - Long-term stability due to a non-contact structure - Low wear and low maintenance design

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  • Actuator
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  • Air Bearing Rotary Stage

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